language: chinese line english

mask aligner

  • mda-80fa
mda-80fa

mda-吉祥棋牌官方正版

  • product description: mda-80fa

mda-80fa

easy operation ui , plc operation with pc control , image grab & data log , more than 100 program recipes , motorized joystick control , motorized zoom microscope and stage , microscope position control system

spec

  • type: full automatic
  • mask size: up to 9 inch
  • substrate size: 8 ~ 12 inch
  • uniform beam size:10.25 * 10.25 inch
  • uv light source:uv lamp, 2 kw
  • beam wavelength:350 ~ 450 nm
  • beam uniformity:<±5 %
  • 365 nm intensity: ~ 25 mw/㎠
  • alignment method:full automatic
  • alignment accuracy: 1 um
  • process mode: soft, hard, vacuum contact & proximity
  • process resolution: 1 um @ 1 um pr thickness with vacuum contact