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ultra vacuum products

  • mbe
  • mbe
  • mbe
  • mbe
mbe mbe mbe mbe


  • product description: mbe


stand-alone mbe system with fast-intro chamber

  • base pressure better than 2x10-10 mbar
  • 4-axes manipulator with direct and e-beam heating up to 1200 °c and ln2 cooling
  • load lock with linear transfer for fast and easy flag style sample holders introduction

. able to store up to 6 holders.
  • process chamber contains ports for e.g. rheed gun, ion gun, beam flux monitor, quartz balances etc.
  • replaceable bottom flange, with a dedicated lifting trolley
  • cross-contamination barriers in the processing chamber

the process chamber is equipped with additional ports for e.g. analysis instruments.

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