language: chinese line english

mask aligner

  • mde-20sc
mde-20sc

mde-吉祥棋牌官方正版

  • product description: mde-20sc

mde-20sc

easy operation ui , plc operation with pc control , image grab & data log , more than 100 program recipes , motorized joystick control , motorized zoom microscope and stage , microscope position control system

spec

  • type: scan & step exposure
  • mask size: user spec
  • substrate size: user spec
  • uniform beam size:user spec
  • uv light source: uv lamp, 1 kw
  • beam wavelength:350 ~ 450 nm
  • beam uniformity:<±5 %
  • 365 nm intensity: 2kw~ 25 mw/㎠, 5kw~ 45 mw/㎠,
  • alignment method: no alignment
  • alignment accuracy: no alignment
  • process mode: soft, hard, vacuum contact
  • process resolution:[email protected] pr thickness with vacuum contact


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