language: chinese line english

mask aligner

  • mda-20fa
  • mda-20fa
  • mda-20fa
mda-20famda-20famda-20fa

mda-吉祥棋牌官方正版

  • product description: mda-20fa

mda-20fa

easy operation ui , plc operation with pc control , image grab & data log , more than 100 program recipes , motorized joystick control , motorized zoom microscope and stage , microscope position control system

spec

  • type: full automatic
  • mask size: user spec
  • substrate size: user spec
  • uniform beam size:user spec
  • uv light source: uv lamp, 2 kw,5kw
  • beam wavelength:350 ~ 450 nm
  • beam uniformity:<±5 %
  • 365 nm intensity: 2kw~ 25 mw/㎠, 5kw~ 45 mw/㎠,
  • alignment method:full automatic
  • alignment accuracy: 1 um
  • process mode: soft, hard, vacuum contact & proximity
  • process resolution:lens>3um,mirror>9um
  • weight:1500kg
  • dimension:2600(w)*2300(d)*2400(h)


previous:mda-12fa next:mde-20sc