language: chinese line english

mask aligner

  • mda-12fa
  • mda-12fa
mda-12famda-12fa

mda-吉祥棋牌官方正版

  • product description: mda-12fa

mda-12fa

easy operation ui , plc operation with pc control , image grab & data log , more than 100 program recipes , motorized joystick control , motorized zoom microscope and stage , microscope position control system

spec

  • type: full automatic
  • mask size: up to 14 inch
  • substrate size: 8 ~ 12 inch
  • uniform beam size:13.25 * 13.25 inch
  • uv light source: uv lamp, 2 kw,5kw
  • beam wavelength:350 ~ 450 nm
  • beam uniformity:<±5 %
  • 365 nm intensity: 2kw~ 25 mw/㎠, 5kw~ 45 mw/㎠,
  • alignment method:full automatic
  • alignment accuracy: 1 um
  • process mode: soft, hard, vacuum contact & proximity
  • process resolution: 2um @ 1 um pr thickness with vacuum contact