mda-吉祥棋牌官方正版

mda-400lj/600lj

easy operation & installation , handling substrates of various sizes , plc control with touch screen panel

• type fully manual
• substrate size piece to 6 inch circle
• beam wavelength350 nm
• beam uniformity<±3 %
• 365 nm intensity~ 20 mw/㎠
• alignment method manual
• alignment accuracy1 um
• process mode: soft, hard, vacuum contact & proximity
• process resolution:1 um @ 1 um pr thickness with vacuum contact
• weight (kg)
• dimensions (mm)800(w) * 800(d) * 800(h)